時間：2026-05-29(五) 15:20 pm

講題：Facing the Productivity Challenges of Semiconductor Manufacturing

講者：蔡博仲 經理

服務單位：科林研發

地點：93456

主持人：田弘康 教授

摘要：

This talk addresses the growing productivity challenges in semiconductor manufacturing as technology nodes continue to shrink. It begins with a high-level overview of the chip fabrication process, setting the stage for a deeper exploration of plasma etch—one of the most critical and complex steps. The discussion will focus on how plasma is generated and controlled, and how advanced etch equipment enables precise pattern transfer at nanometer scales.

學經歷 :

2012年 台灣大學化工研究所

2013年 長春大連化工

2014-2017 Applied Material

2017-present Lam Research